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| MPB’s Waveguide Spectrometer holds US Patent # 7,034,935 B1 - April 25, 2006 |
The spectrometer is the result of integration of infrared fiber optics and waveguide with advanced infrared linear detector arrays.
The spectrometer is based on an infrared slab waveguide to monolithically integrate an optical fiber or laser-machined slit at the optical input. It includes a multistage TE-cooled detector array at the optical output.
The optical signal is guided within the slab waveguide onto a master blazed grating structure that also serves as a concave reflector.
The diffraction grating is formed in crystalline semiconductor material using multi-step processing involving photolithography, reactive ion etching and additional chemical processing.
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